MEMS
Micro-Electro-Mechanical Systems
Solid-state devices that involve some degree of physical movement. The manufacturing process is the same (or nearly) as that used for silicon microchips.
MEMS devices are often dramatically smaller than their non-solid-state counterparts. For this reason, MEMS components are common in phones, where interior physical space is precious.
Examples of common MEMS components include accelerometer sensors, gyroscopes, and microphones. They can also be used for speaker elements and active air cooling (a solid-state fan).
